Introduction to Microsystem Technology: A Guide for Students (Wiley Microsystem and Nanotechnology) (Hardcover)

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Introduction to Microsystem Technology: A Guide for Students (Wiley Microsystem and Nanotechnology) (Hardcover)

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內容描述

Description
Over half a century after the discovery of the piezoresistive effect,
microsystem technology has experienced considerable developments. Expanding the
opportunities of microelectronics to non-electronic systems, its number of
application fields continues to increase. Microsensors are one of the most
important fields, used in medical applications and micromechanics. Microfluidic
systems are also a significant area, most commonly used in ink-jet printer
heads.
This textbook focuses on the essentials of microsystems technology, providing
a knowledgeable grounding and a clear path through this well-established
scientific dicipline. With a methodical, student-orientated approach,
Introduction to Microsystem Technology covers the following:

microsystem materials (including silicon, polymers and thin films), and
the scaling effects of going micro;
fabrication techniques based on different material properties,
descriptions of their limitations and functional and shape elements produced
by these techniques;
sensors and actuators based on elements such as mechanical, fluidic, and
thermal (yaw rate sensor components are described);
the influence of technology parameters on microsystem properties, asking,
for example, when is the function of a microsystem device robust and safe?

The book presents problems at the end of each chapter so that you may test
your understanding of the key concepts (full solutions for these are given on an
accompanying website). Practical examples are included also, as well as case
studies that enable a better understanding of the technology as a whole. With
its extensive treatment on the fundamentals of microsystem technology, this book
also serves as a compendium for engineers and technicians working with
microsystem technology.